GünEr
Vaksis GünEr platform is composed of many vacuum chambers and a load lock chamber. This platform has a circular cluster structure and involves different techniques and combinations.
- Ultimate Vacuum Pressure ≤ 5x10-8 Torr
- Number of Process Chambers up to 8
- Number of Load Lock Chamber 1
- Number of Robotic Transfer Chamber 1
- Substrate Size 30x30 cm
- Substrate Heating max. 400oC
- Cooling Where necessary
- Loading With Load Lock and Transfer Chamber
- Control Fully Automatic
- Additional Gas SafetyAvailable Upon Request
POWER SOURCES
- DC and/or RF Power Supply for Sputtering Magnetron Source
- Effusion Cell A.C. Power Supply for Metal and OLED Evaporation Sources
- High-Current Low-Voltage A.C. Power Supply for Resistive Thermal Evaporation Source
- Power Supply for Electron Beam Evaporation Source
- DC and/or RF Power Supply for Capacitively coupled plasma (CCP) or RF Power Supply for Inductively coupled plasma (ICP) Sources
