RF Plasma Surface Modification
Systems can be used for removing contaminants, promoting adhesion between two surfaces, controlling surface tension, enhancing biocompability with using oxygen and various other gas plasmas.
- Base pressure: 5x10-3 Torr (optional: 5x10-6 Torr)
- Leak Rate < 10-8 Torr.l/s
- Mass Flow Control: 0.2 - 2 Torr
- Pump: 1 mechanical pump (optional: turbomolecular pump)
- Pumping Speed ≥ 10 m3/h (optional: 65 l/s with TMP)
- Power Generator: 13.56 MHz, 300 W
- Valves: Block valve and throttle valve (optional: gate valve)
- Control: Manual (optional: full automation)
For more detailed information, send an e-mail to info@vaksis.com.
