PVD handy sm
PVD-handy sm series is a part of Vaksis PVD – handy platform which designed and manufactured for low budget. PVD-handy sm series is really convenient for use and easily handled as the adjective “handy” described in the dictionary.
- Base pressure ≈ 2x10-6 Torr
- Substrate Size: Max. 3” diameter
- Thickness Measurement: In-situ measurement with Quartz X-tal Oscillator
- Temperature Controlling System: PID method
- Number of Power Sources 1
- Number of Sources Max. 2
- Loading Raised bell jar with a lift mechanism
- Control Semi-Automatic
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POWER SOURCES
- DC and/or RF Power Supply for Sputtering Magnetron Source
- Effusion Cell A.C. Power Supply for Metal and/or Organic Evaporation Sources
- Power Supply for Resistive Thermal Evaporation Source
