GünEr
Vaksis GünEr platform is composed of many vacuum chambers and a load lock chamber. This platform has a circular cluster structure and involves different techniques and combinations.
- Ultimate Vacuum Pressure ≤ 5x10-8 Torr
- Number of Process Chambers up to 8
- Number of Load Lock Chamber 1
- Number of Robotic Transfer Chamber 1
- Substrate Size30x30 cm
- Substrate Heating max. 400oC
- Cooling Where necessary
- Loading With Load Lock and Transfer Chamber
- Control Fully Automatic
- Additional Gas SafetyAvailable Upon Request
For more detailed information, send an e-mail to info@vaksis.com.
