Handy in Glovebox
Glovebox Integrated Thin Film Deposition System
Designed and manufactured to deposit controlled nano- and micro-meter-thick thin films/coatings on flat surfaces on max. 40 mm diameter wafers or glass.
- Base Pressure < 2x10-7 Torr
- Leak Rate < 10-8 Torr.l/s
- High-speed Pump 700 l/s diffusion pump
- Mechanical Pump 2.5 m3/h dual stage mechanical pump
- Substrate Size 40 mm diameter
- Thickness Measurement In-situ measurement with Quartz X-tal Oscillator
- Deposition Mode Upward
- Number of Sources 2
- Loading From top
- Control Manual
Glovebox
- Material 304 Stainless Steel, Butyl Rubber Gloves
For more detailed information, send an e-mail to info@vaksis.com.
