- Base Pressure < 2x10-7 Torr
- Leak Rate 10-8 Torr.l/s
- Split Type Tube Furnace Horizontal design
- Quartz Tube Diameter 100 mm
- Max. Temperature 1100oC
- Continuous Working Temperature 1050oC
- Heating Area Length 250 mm
- Temperature Control System PID method
- Number of MFC 4
- Loading From one end of the quartz tube
- Control Full Automation on PC
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