MiDAS twin
MiDAS Twin series is a member of Vaksis MiDAS COATING SYSTEMS platforms comprised of two chambers with a common pumping station. The series are composed of prismatic vacuum chambers and involve different techniques and combinations.
Ultimate Vacuum Pressure ≤ 5x10-8 Torr
Number of Chambers 2
Substrate Size 4”- 8” diameter
Substrate Heating max. 800oC
Substrate Rotation 3-30 rpm
Cooling Where necessary
Deposition Mode Upward
Load lock chamber Optional
Control Fully Automatic
DOWNLOAD BROCHURE
POWER SOURCES
- DC and/or RF Power Supply for Sputtering Magnetron Source
- Effusion Cell A.C. Power Supply for Metal and/or Organic Evaporation Sources
- High-Current Low-Voltage A.C. Power Supply for Resistive Thermal Evaporation Source
- Power Supply for Electron Beam Evaporation Source
