MiDASm
MiDASm series are the smallest member of the Vaksis MiDAS COATING SYSTEMS platforms. This series are composed of prismatic vacuum chambers and involve different techniques and combinations.
- Ultimate Vacuum Pressure ≤ 5x10-7 Torr
- Substrate Size max. 4” diameter
- Substrate Heating max. 800oC
- Substrate Rotation 3-30 rpm
- Cooling Where necessary
- Deposition Mode Upward
- Thickness Measurement In-situ measurement with Quartz X-tal Oscillator
- Control Fully Automatic
DOWNLOAD BROCHURE
POWER SOURCES
- DC and/or RF Power Supply for Sputtering Magnetron Source
- Effusion Cell A.C. Power Supply for Metal and/ or Organic Evaporation Sources
- High-Current Low-Voltage A.C. Power Supply for Resistive Thermal Evaporation Source
- Power Supply for Electron Beam Evaporation Source
