MiDAS in Glovebox
MiDAS in Glovebox series are a member of Vaksis MIDAS COATING SYSTEMS platforms which composed of prismatic vacuum chambers and involve different techniques and combinations.
- Ultimate Vacuum Pressure ≤ 5x10-8 Torr
- Number of Chambers up to 2 per GB
- Substrate Size 4”- 8” diameter
- Substrate Heating max. 800oC
- Substrate Rotation 3-30 rpm
- Cooling Where necessary
- Deposition Mode Upward
- Load lock chamber Optional
- Glovebox Impurities <1 ppm oxygen (O2) and moisture (H2O)
- Control Fully Automatic
POWER SOURCES
- DC and/or RF Power Supply for Sputtering Magnetron Source
- Effusion Cell A.C. Power Supply for Metal and/or Organic Evaporation Sources
- High-Current Low-Voltage A.C. Power Supply for Resistive Thermal Evaporation Source
- Power Supply for Electron Beam Evaporation Source
