MiCKS
Architectural Glass Coating System. Vaksis MiCKS platform is composed of prismatic vacuum chambers and involve the magnetron sputtering technique on glass panes or large wafers. It is mostly used for low-e coatings, anti-reflection coatings, electrochromic coatings, transparent conductive oxide coatings, nitride resistors, high conductivity coatings, etc.
- Ultimate Vacuum Pressure ≤ 5x10-8 Torr
- Substrate Size up to 30x30 cm
- Substrate Heating max. 400oC
- Cooling Where necessary
- Deposition Mode Upward/Downward
- Number of Sources Up to 10
- Loading Using Load Lock Chamber
- Control Fully Automatic
DOWNLOAD BROCHURE
POWER SOURCES
- DC and/or RF Power Supply for Sputtering Magnetron Source
